316L不锈钢表面二次电子发射抑制微结构的激光辅助水射流加工实验
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关键词：激光辅助水射流；316L不锈钢；二次电子发射;激光微纳加工中图分类号：TG664 文献标识码：Adoi：10.37188/OPE.20253314.2206 CSTR：32169.14.OPE.20253314.2206
Experimental laser assisted water jet machining secondary electron emission suppression microstructures on 316L stainlesssteelsurface
XU Xiangyue 1，2 ，YAO Yanru，CHU Dongkai 1，2* ， LIU Xuefei1.2
（1. Aduanced Technologies （CaJET）， ， University ， 25Oo61，China;2. High Efficiency Manufacture the Education， 250061，China;3.High Attached to University， 25OO14，China） * Corresponding author， E -mail： chudongkai@sddu.edu.cn
Abstract：In order to reduce the secondary electron emissvity the surface 316L stainless steel，an ar ray grooves grids that can reduce the secondary electron emissivity the surface stainless steel was designed. The designed arrays were pmachined by laser assisted water jet technology the surface secondary electron emission rate was detected. First，the grooves grid arrays were designed to reduce the number secondary electron emissions using CASINO simulation stware. Then the response surface method was used to study the efect laser assisted water jeting process parameters on the depth-towidth ratio the grooves， a regresson prediction model the grooves'depth-to-width ratio was obtained to obtain the combination maximum depth-to-width ratio processing parameters.Finally，the laser assisted waterjet machining grooves grid arrays Was carried out， the secondary electron emissivity the surface was detected. The experimental results show that the secondary electron emissivity the groove lattice array surfaces decreased dramatically，with the peak secondary electron emissivity 1.481.25，respectively，which are 36.50% 46.35% lower than that the unprocessed surface with the peak secondary electron emissivity 2.33，respectively. The permance groove array grid array in suppressing the secondary electron emission rate 3l6L stainless steel surface is excellent.
Words：laser asssted water jet；316L stainless steel； secondary electron emission；laser micro-nanabrication
1引言
二次电子发射现象是指具有一定能量的电子轰击物体表面所引发的次级电子出射现象[1-2]。（剩余16574字）
