面向柔性钳位型尺致动器提速驱动的协同切换控制

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Collaborative switching control for improved-speed driving of flexible clamp-type inchworm actuator

MENG Lingchen 1，2 ，YAN Peng 1，2* ， LIU Pengbo²， ZHANG Zhiming4

School ofMechanical Engineering， Shandong University， Jinan 25Oo61， China; 2. Key Laboratory ofHigh-efficiency and Clean Mechanical Manufacture of the Ministry of Education，Jinan 250061，China; 3.School ofMechanical Engineering，Qilu University of Technology （Shandong Academy ofSciences， Jinan 250353，China; 4. School ofMechanical and Electrical Engineering，Jining University，Qufu 273155，China） * Corresponding author， E -mail： yanpeng@sdu. edu. cn

Abstract： This study explores the clamping-driving coordination mechanism and control strategies for a flexible clamp-type inchworm actuator，introducing an innovative high-speed clamping switching method based on real-time clamping state information.By utilizing the parasitic motion characteristics of the flexible clamping mechanism，the proposed strategy minimizes clamping alternation time，thereby achieving higher driving speeds under identical design parameters. A static model of the parasitic motion of the clamping mechanism was first established based on the actuator's configuration and verified through simulations.The real-time clamping switching mechanism was subsequently analyzed，leading to the development of a driving strategy incorporating real-time clamping state feedback. An experimental setup was constructed to validate the theoretical model and simulation results. Experimental findings demonstrate that the proposed strategy reduces single-step switching time by 28% and increases continuous multi-step driving speed by 25% under the same design and driving voltage conditions. These results confirm the accuracy of the theoretical and simulation analyses within an acceptable margin of error. The proposed strategy significantly reduces the single-cycle operating time of the inchworm actuator，enabling continuous and stable actuation while substantially enhancing driving performance.

Key words ： flexible mechanism； inchworm actuator； parasitic movement; collaborative switching control

1引言

压电致动器凭借定位精度高、响应速度快、体积紧凑以及与非磁性和真空环境兼容等显著优势，在集成电路制造、精密光学仪器和生物医学等领域应用广泛[1-3]。（剩余12894字）