光纤准直非球面微透镜阵列模压成形

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Precision glass molding for fiber collimating aspherical microlens array

GAO Lihengl，YU Qian 1* ，ZHOU Tianfeng¹，ZHOU Jia 3 ，SUN Xiuwen1， YANTao²，RUANBenshuai4

（1. School ofMechanical Engineering，Beijing Institute of Technology， Beijing 1Ooo8l， China; 2. Jiangxi Phenix Optical Technology Co.，Ltd.，Shangrao 334OOO，China; 3. Suzhou Institute ofNano-Tech and Nano-Bionics， Chinese Academy of Sciences， Suzhou 215123，China; 4.Cheerful Micro-Nano Technology （Ningbo） Co. Ltd.，Ningbo 3155OO， China） * Corresponding author，E-mail： yu_qian@bit. edu. cn

Abstract： This study explores the application of precision glass molding （PGM） technology to enhance the machining accuracy and effciency of aspherical microlens arrays （AMLA） for fiber array collimation. The research focuses on the control of mold machining accuracy and the implementation of a compensation approach to address form errors in AMLA fabrication. A localized spiral diamond milling method is ntroduced for machining nickel-phosphorus mold materials，tailored to the structural characteristics and stringent precision requirements of AMLA. Furthermore，a form error compensation method is developed， considering the high-temperature properties of mold and glass materials as well as process parameters affecting accuracy.By optimizing the mold profile through compensation design，the precision of PGM is significantly improved，achieving the high-accuracy fabrication of a 10×10 AMLA. The proposed process controls the form error peak-to-valley（PV）within 220-380nm andachievesa surface roughness ∇[Ra） of 7-10nm ，thereby enhancing optical performance. This work provides a viable and eficient technical framework for the high-precision， large-scale production of AMLA.

Key Words： ultraprecision machining；spiral diamond milling； aspherical microlens array； precision glassmolding；form error

1引言

光纤准直透镜是一种将光纤中传输的光束进行有效准直的光学元件，通常用于光通信装置、激光系统和光学传感器中，以确保光线能够以最佳的发散角度射出，实现耦合效率和传输距离最大化，减少信号损失，提高系统性能。（剩余9906字）