宽禁带半导体X 射线探测器研究进展

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中图分类号：TL816. 1 文献标识码： ADOI：10. 37188/CJL. 20240312 CSTR：32170. 14. CJL. 20240312

Development of X-ray Detectors Based on Wide-bandgap Semiconductor

WU Xuan 1，2 ，GAO Runlong3，LIU Zhiyu 1 ，ZHONG Xiangli1， LIU Linyue 1，2* ，OUYANG Xiaoping2

（1. School of Materials Science and Engineering，Xiangtan University，Xiangtan 411105，China； 2. State Key Laboratory of Intense Pulsed Radiation Simulation and Effect，Northwest Institute of Nuclear Technology， Xi’an 710024，China； 3. Sino-French Institute of Nuclear Engineering and Technology，Sun Yat-Sen University，Zhuhai 519082，China） Corresponding Author，E-mail：liulinyue@nint. ac. cn

Abstract：High-performance semiconductor X-ray detectors prefer outstanding characteristics including low detec⁃ tion of limit，low dark current，high sensitivity，fast response time，high radiation hardness and so on. Wide-band⁃ gap semiconductors such as silicon carbide（SiC），gallium nitride（GaN），diamond，gallium oxide（ Ga2O3 ），and zinc oxide（ZnO）exhibit exceptional properties，including a wide bandgap，high electron mobility，high breakdown field strength，high saturated carrier drift velocity，and large displacement energy. These characteristics enable them to demonstrate superior performance in X-ray detection，meeting the requirements for high-performance semiconduc⁃ tor X-ray detectors and making them highly promising candidates for such applications. As a result，they have emerged as promising candidates for advanced X-ray detectors. In this paper，the electrical properties，preparation technology and detection performance of SiC，GaN，diamond，Ga₂O ₃，ZnO X-ray detectors are introduced，and the latest research is discussed. Meanwhile，future research directions and potential applications of wide-bandgap semi⁃ conductor X-ray detectors in medical imaging，industrial detection and space exploration conduct in-deep thinking.

Key words：wide-bandgap；semiconductor；X-ray detector；gallium nitride；silicon carbide；diamond

1 引 言

1895 年，德国物理学家伦琴首次发现 X 射线，这一科学发现具有里程碑式的意义，深刻改变了人类对电磁辐射的理解，为人类探索微观世界提供了新的手段和途径[1]。（剩余35323字）