基于集成氮化硅超表面VCSEL的涡旋光输出

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关键词：超表面；涡旋光束；垂直腔面发射激光器；集成光子器件中图分类号：0436；TN248.4 文献标识码：ADOI：10.37188/CJL.20240300 CSTR：32170.14.CJL.20240300

VortexLight OutputBasedonIntegrated Silicon Nitride MetasurfaceVCSEL

NIU Hao1，2.3，WANG Yongli³，JIANG Zengxuan³，LI Chuanchuan³， WEI Zhipeng1*， SONG Guofeng³

（1.StateKeyLaboratoryofHigh PowerSemiconductor Laser，Changchun UniversityofScienceandTechnology，

Changchun130022，China;

2.Zhongshan InstituteofChangchun UniversityofScienceandTechnology，Zhongshan528437，China;

3.LaboratoryfnoOtoelectronics，stituteofemiconuctors，insecademyofiences，BeijingOoina）

*CorrespondingAuthors，E-mail：zpweicust@126.com;sgf@semi.ac.cn

Abstract：Thelatest developmentof integrated photonicdevice technology fuly meets the marketdemand forcompactandeficientoptoelectronicsystems，andalso effectively promotes thedevelopmentofoptical metasurface technology.Among them，the integration of vertical cavity surface emiting laser（VCSEL）and metasurface can generate vectorbeamswith specific wavefronts，which greatly enhancesthe functionalityand flexibilityofoptoelectronic systems.In this paper，an 85O nm VCSEL based on nanoantenna array metasurface is designed. By adjusting the structural parameters of the nanoantenna，more than 2 π phase coverage is achieved，and vortex beams of different ordersaresuccessfully generated by using first-order and second-order vortex phase plates.This result provides a new idea for the optical metasurface control of VCSEL light field technology.

KeyWords：metasurface;vortex beam；vertical cavity surface emitting laser;integrated photonic devices

1引言

随着对光学集成度需求的提升，传统光学元件已无法满足现代应用的性能要求。（剩余11382字）