晶圆制造薄膜车间的对象Petri网和人工势场调度优化方法

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关键词：智能制造；晶圆制造薄膜车间；对象Petri网；人工势场； A* 算法；调度优化中图分类号：TP273.5 文献标志码：A 文章编号： 1000-5013（2026）02-0127-09

Object Petri Net and Artificial Potential Field Scheduling Optimization Method for Wafer Fabrication Thin-Film Workshop

YE Zhaoyu 1，2 ， ZHANG Shenglong²，³，ZHOU Jiazhong 2，3 YI Sijia1² ， LUO Jiliang2，3

（1. College of Mechanical Engineering and Automation，Huaqiao University，Xiamen 36lo21，China; 2. Fujian Engineering Research Center of Motor Control and System Optimal Schedule， Huaqiao University，Xiamen 361o21，China； 3. College of Information Science and Engineering，Huaqiao University，Xiamen 361o21，China）

Abstract：To address the scheduling optimization challenge in wafer fabrication thin-film workshops，where robot path planningis tightly coupled with machine resource alocation，a method that can obtain high-quality scheduling solutions within limited computation time is proposed.An object Petri Net model is constructed to integrate robot path，machine processing，and task workflows into a unified framework. A time-consumptionbased artificial potential field is designed，in which task demand intensity is introduced to dynamically characterize resource urgency. Meanwhile，a relationship between the amplification factor and the potential field function is proposed to enhance the utilization of high-cost equipment. Based on these designs，an artificial potential field guided A* search algorithm is developed. Experimental results show that， for small-scale tasks， the proposed method achieves the same optimal solution as the Dijkstras algorithm while improving search efficiency by approximately 96% . In complex multi-robot scenarios，where Dijkstra fails due to state-space explosion，the proposed method is stillable to generate near-optimal scheduling solution within minutes.

Keywords：intelligent manufacturing；wafer fabrication thin-film workshop；object Petri Net；artificial potential field; A* algorithm；scheduling optimization

半导体制造是现代信息产业的基石，对国家经济和国防安全具有战略意义。（剩余11509字）