MEMS 振镜式结构光三维重建综述
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中图分类号：TP394. 1；TH691. 9 文献标识码：Adoi：10. 37188/OPE. 20253307. 1065 CSTR：32169. 14. OPE. 20253307. 1065
Review of MEMS vibration-mirror-based 3D reconstruction of structured light
HAN Min1，ZHANG Chenping2，ZHANG Zonghua2*，LI Xinghui1 （1. Shenzhen International Graduate School，Tsinghua University，Shenzhen 518055，China； 2. School of Mechanical Engineering，Hebei University of Technology，Tianjin ，China） * Corresponding author，E-mail：zhzhang@hebut. edu. cn；li. xinghui@sz. tsinghua. edu. cn
Abstract：Structured light-based 3D reconstruction serves as a fundamental component in the perception of the three-dimensional real world by intelligent systems，exhibiting significant potential across various in⁃ dustrial domains such as industrial inspection，intelligent manufacturing，biomedicine，robotic vision guid⁃ ance，virtual reality，and embodied intelligence. This study first reviews prevalent fringe projection tech⁃ niques，emphasizing both the established mainstream DLP fringe projection and the novel MEMS mirrorbased fringe projection technologies. A comprehensive comparison is conducted regarding operational prin⁃ ciples，performance metrics，and respective advantages and limitations，highlighting the promising devel⁃ opmental trajectory of MEMS mirror-based structured light technology. Subsequently，calibration chal⁃ lenges arising from the non-invertible camera characteristics inherent to MEMS structured light are ad⁃ dressed by summarizing several physically interpretable calibration models tailored for MEMS systems. Distinct from DLP structured light，MEMS structured light employs laser beam scanning and introduces unique error sources，which are systematically analyzed to inform future strategies for measurement accura⁃ cy enhancement. Finally，the applications of structured light are discussed，and future development trends of MEMS structured light technology are projected.
Key words：structured light；3D reconstruction；MEMS vibration mirror；fringe projection profilometry，； error source；system calibration
1 引 言
三维重建是指被测物体的三维形貌恢复技术，目前在智能机器人、工业检测、文物复原和医疗成像等领域有着广泛应用［1-10］。（剩余50599字）
