基于双棱镜的全视场外差干涉测量

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中图分类号：O436. 1；TH744 文献标识码：Adoi：10. 37188/OPE. 20253307. 1019 CSTR：32169. 14. OPE. 20253307. 1019

Full-field heterodyne dynamic interferometric measurement with double-prism configuration

JIAO Qilu 1，2 ，ZHU Conghui1，LYU Tong1，WU Zhou1，2，ZHANG Wenxi 1，2 （1. Aerospace Information Research Institute，Chinese Academy of Sciences，Beijing 100094，China； 2. School of Optoelectronics，University of Chinese Academy of Sciences，Beijing ，China） * Corresponding author，E-mail：zhangwenxi@aoe. ac. cn

Abstract：To improve measurement applicability and reduce the impact of stray light and frequency mix⁃ ing on interferometric results，a high-precision，low-noise dynamic interferometric measurement system is proposed. This system is based on a novel double-prism dynamic interferometer design，suitable for fullfield heterodyne dynamic interferometric measurement techniques. It addresses the effects of frequency mixing on measurement results，further mitigates the influence of stray light，and utilizes ideal fiber-optic output to replace the reference surface，thereby avoiding the impact of reference surface nonuniformity on measurement accuracy. This paper explains the basic configuration of the interferometer，describes the measurement principles，models and simulates stray light in the new double-prism structure，provides addi⁃ tional analysis on frequency mixing errors，and presents experimental validation of stray light and frequen⁃ cy mixing effects. Experimental results show that the stray light in the divergent structure differ by up to an order of magnitude of 3. 2 compared to those in the parallel light structure. This configuration is free from frequency mixing effects. When measuring a component with a 3% reflectivity，the introduced surface shape measurement error is less than 0.0155λ relative to the Twyman-Green configuration，which is con⁃ sistent with simulation results. The full-field heterodyne dynamic measurement technique based on the dou⁃ ble-prism configuration enhances measurement applicability，reduces the impact of stray light frequency mixing on low-frequency measurement results，suppresses the effects of frequency mixing，and further im ⁃ proves the measurement accuracy of the interferometer.

Key words：interferometric measurement；double-prism configuration；full-field heterodyne；stray light； frequency mixing

1 引 言

全视场外差干涉测量技术广泛应用于干涉测量领域，具有测量速度快、抗振性能好、测量精度高的优点。（剩余13657字）